RECENT PUBLICATIONS
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F.W. DelRio, J. Lai, N. Ferralis, T-J. K. Liu, R. Maboudian, "Al-2%Si Induced
Crystallization of Amorphous Silicon", Electrochemical and Solid-State Letters,
10 11 H337-H339 (2007)
Ferralis, N., Maboudian, R., and Carraro, C., "Structure and Morphology of Annealed Gold Films Galvanically Displaced on the Si(111) Surface", J. Phys. Chem. C, 111, 20, 7508 - 7513 (2007).
V. Radmilovic, U. Dahmen, D. Gao, C.R. Stoldt, C. Carraro, and R. Maboudian, “Nucleation and Growth of 3C-SiC Films on Si(100) Substrate”, Diamond and Related Materials 16, 74-80 (2007).
J. Oomens, N. Polfer, O. Pirali, Y. Ueno, R.
Maboudian, P.W. May, J. Filik, J.E. Dahl, S.G. Liu, R.M.K. Carlson "Infrared
spectroscopic investigation of higher diamondoids", Journal of Molecular
Spectroscopy 238, 158-167 (2006).
C. Roper, R. Howe, and R. Maboudian, "Stress control of polycrystalline 3C-SiC
films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane
as precursors", J. Micromechanics and Microengineering 16 (2006) 2736-2739.
C. Roper, C. Carraro, R. Howe, and R. Maboudian, “Silicon Carbide Thin Films using 1,3-Disilabutane Single Precursor for MEMS Applications - A Review”, ECS Trans. 3, (10) 267 (2006)
J. Frechette, R. Maboudian and C. Carraro, “Effect of Temperature on In-use
Stiction of Cantilever Beams Coated with Perfluorinated Alkysiloxane Monolayers”,
Journal of Microelectro-mechanical Systems 15, 737-744 (2006).
J. Zhang, R.T. Howe, and R. Maboudian, “Control of Strain Gradient in
Polycrystalline Silicon Carbide Films through Tailored Doping”, Journal of
Micromechanics and Microengineering16, L1-L5 (2006).
C. Majidi, R.E. Groff, K. Autumn, S. Baek, B. Bush, R. Maboudian, N. Gravish, Y.
Maeno, B. Schubert, M. Wilkenson and R. Fearing, “High Friction from a Stiff
Fiber using Micro-Fiber Arrays”, Physical Review Letters 97, 76103-06 (2006).
C. Roper, V. Radmilovic, R. Howe, and R. Maboudian “Single-Source Chemical Vapor Deposition of SiC Films in a Large-scale LPCVD Reactor: Growth, Chemical, and Mechanical Characterization”, Journal of the Electrochemical Society, 153 (8) C562-C566 (2006).
J. Frechette, R. Maboudian, and C. Carraro, “Thermal Behavior of
Perfluoroalkylsiloxane Monolayers on the Oxidized Si(100) Surface”, Langmuir
22, 2726-2730 (2006).
B. Bush, Z. Xu, C. Carraro, and R. Maboudian, “Layer-by-Layer Self-Assembled
Conductive Thin Films for MEMS Applications”, Sensors and Actuators A
126, 194-200 (2006).
I. Lombardi, L. Magagnin, P. L. Cavallotti, C. Carraro, and R. Maboudian,
“Electrochemical Fabrication of Supported Ni Nanostructures through Transferred
Porous Anodic Alumina Mask”, Electrochemical and Solid State Letters 9,
D13-16 (2006).
I. Lombardi, A. Hochbaum, P. Yang, C. Carraro, and R. Maboudian, “Synthesis of
High Density, Size Controlled Si Nanowire Arrays via Porous Anodic Alumina
Mask”, Chemistry of Materials 18, 988-991 (2006).
J. Zhang, R.T. Howe, and R. Maboudian, “Electrical Characterization of n-type
Polycrystalline 3C-Silicon Carbide Thin Film Deposited by 1,3-Disilabutane”,
Journal of the Electrochemical Society 153, G548-551 (2006).
S. Bhave, D. Gao and R. T. Howe, R. Maboudian, “Fully Differential
Poly-SiC Lamé Mode Resonator and Checkboard Filter”, Technical Digest,
Proceedings of the 2005 MEMS Workshop, MEMS’05, January 2005, pp. 223-336.
R. He, D. Gao, R. Fan, A. Hochbaum, C. Carraro, R. Maboudian, P. Yang, "Si
Nanowire Bridges in Micro-trenches: Integration of Growth into Device
Fabrication", Advanced Materials 17, 2098 (2005).
A. San Paulo, J. Bokor, R. T. Howe, R. He, P. Yang, D. Gao, C. Carraro, R.
Maboudian, "Mechanical Elasticity of Single and Double Clamped Silicon Nanobeams
Fabricated by Vapor-Liquid-Solid Synthesis", Applied Physics Letters 87,
53111-53113 (2005).
E.E. Parker, C. Carraro, R. Maboudian, "Adhesion Characteristics of MEMS in
Microfluidic Environments", Journal of Microelectromechanical Systems 14,
947-953 (2005).
D. Gao, R. He, C. Carraro, R. T. Howe, P. Yang, and R. Maboudian, "Selective
Growth of Si Nanowires Arrays via Galvanic Displacement Processes", Journal
of the American Chemical Society 127, 4574-4575 (2005).
D. Gao, C. Carraro, V. Radmilovic, R.T.Howe and
R. Maboudian, "Fracture of Polycrystalline 3C-SiC Films in MEMS", Journal of
Microelectromechanical Systems 13, 972-976 (2004).
M.B.J. Wijesundara, D.C. Walther, C.R. Stoldt, K. Fu, D. Gao, C. Carraro, R.
Maboudian, A.P. Pisano, "Low Temperature CVD SiC Coated Si Microcomponents for
Reduced Scale Engines", ASME International Mechanical Engineering Congress
and R&D Expo, in press.
W. R. Ashurst, Y. J. Jang, L. Magagnin, C. Carraro, M. M. Sung, R. Maboudian,
"Nanometer-Thin Titania Films with SAM-level Stiction and Superior Wear
Resistance for Reliable MEMS Performance", Proceedings of IEEE MEMS
Conference, Maastricht, the Netherlands, January 2004, pp. 153-156.
E.E. Parker, W. R. Ashurst, C. Carraro, R. Maboudian, "Stiction in Microfluidic
Environments", Technical Digest, Proceedings of the 2002 Solid-State Sensor
and Actuator Workshop, Hilton Head '04, June 2004, pp. 316-319.
W. R. Ashurst, M. B.J. Wijesundara, C. Carraro, R. Maboudian, "Tribological
Impact of SiC Encapsulation of Released Polysilicon Microstructures",
Tribology Letters 17, 195-198 (2004).
H. Lim, C. Carraro, R. Maboudian, M. Pruessner, R. Ghodssi, "Chemical and
Thermal Behavior of Alkanethiol and Sulfur Passivated InP(100)", Langmuir
20, 743-747 (2004).
M.P. de Boer, D.L. Luck, W.R. Ashurst, R. Maboudian, A.D. Corwin, J.A. Walraven,
J.M. Redmond, "High-performance Surface-micromachined Inchworm Actuator",
Journal of Microelectromechanical Systems 13, 63-74 (2004).
R. Maboudian, C. Carraro, "Surface Chemistry and Tribology of MEMS", Annual
Review of Physical Chemistry 54, 35-54 (2004).
D. Gao, W.B.J. Wijesundara, C. Carraro, R.T. Howe, and R. Maboudian, “Recent Progress Toward A
Manufacturable SiC Surface Micromachining Technology,” IEEE Sensors Journal,
vol. 4(4), special issue on "Micro-Sensors and Micro-Actuators: Technology and
Applications," 441-448 (2004).
D. Gao, W.R. Ashurst, C. Carraro, R.T. Howe, and
R. Maboudian, “Silicon Carbide for Enhanced MEMS Reliability,” Tech. Dig.
Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island,
South Carolina, 192-195 (2004).
R. Ashurst, C. Carraro, J.D. Chinn, V. Fuentes, B. Kobrin, R. Maboudian, R.
Nowak, R. Yi. "Improved vapor-phase deposition technique for anti-stiction
monolayers," Proceedings of SPIE - the International Society for Optical
Engineering, 5342(1), 204-211 (2004).
G. Valente, M.B.J. Wijesundara, R. Maboudian, C. Carraro. "Single-source CVD of
3C-SiC films in a LPCVD Reactor Part II: Reactor Modeling and Chemical Kinetics," Journal of the Electrochemical Society,
151(3), C215-19 (2004).
M.B.J. Wijesundara, G. Valente, W.R. Ashurst, R.T. Howe, A.P. Pisano, C. Carraro,
R. Maboudian. "Single-source chemical vapor deposition of 3C-SiC films in a
LPCVD Reactor Part I: Growth, Structure and Chemical Characterization," Journal of the Electrochemical Society, 151(3), C210-14
(2004).
D. Gao, M.B.J. Wijesundara, C. Carraro, R.T. Howe, and R. Maboudian,"Transformer Coupled Plasma Etching of 3C-SiC Films using Fluorinated Chemistry for MEMS Applications," Journal of Vacuum Science & Technology B, 22(2), 513-518 (2004), selected for the March 1, 2004 issue of Virtual Journal of Nanoscale Science & Technology.
R. Maboudian, C. Carraro, "Surface Engineering
for Reliable Operation of MEMS Devices", Journal of Adhesion Science and
Technology 17, 583-591 (2003).
W.R. Ashurst, C. Carraro, R. Maboudian. "Vapor
phase anti-stiction coatings for MEMS," IEEE Transactions on Device &
Materials Reliability, 3(4), 173-178 (2003).
A.C. Fernandez-Pello, A.P. Pisano, K. Fu, D.C. Walther, A. Knobloch, F. Martinez, M. Senesky, C. Stoldt, R. Maboudian, S. Sanders, D. Liepmann. "MEMS rotary engine power system," Transactions of the Institute of Electrical Engineers of Japan, Part E, 123-E(9), 326-30 (2003)
M.B.J. Wijesundara, D. Gao, C. Carraro, R.T.
Howe, and R. Maboudian, "Nitrogen Doping of Polycrystalline 3C-SiC Films Grown
using 1,3-Disilabutane in a Conventional LPCVD Reactor," Journal of Crystal
Growth, 259, 18-25 (2003).
D. Gao, M.B.J. Wijesundara, R.T. Howe, and R. Maboudian, "Characterization of
Residual Strain in SiC Films Deposited using 1,3-Disilabutane for MEMS
Applications," Journal of Microlithography, Microfabrication, and Microsystems,
2 (4), 259-264 (2003).
G. Valente, C. Stoldt, R. Maboudian, and C. Carraro, "Theoretical and Experimental Study of the Chemisorption of 1,3-disilabutane on the Si(100) Surface", Journal of Chemical Physics 118, 6089-6097 (2003).
W. R. Ashurst, M. P. deBoer, C. Carraro, and R. Maboudian, "An Investigation of Side-wall Adhesion in MEMS", Applied Surface Science 212-213, 735-41 (2003).
W. R. Ashurst, C. Carraro, R. Maboudian, and W. Frey, "Wafer Level Anti-Stiction Coatings with Superior Thermal Stability", Sensors and Actuators A104, 213-221 (2003).
L. Magagnin, R. Maboudian and C. Carraro, "Adhesion Evaluation of Immersion Plating Copper Films on Silicon by Microindentation Measurements", Thin Solid Films, 434, 100-105 (2003).
D. Gao, R.T. Howe, and R. Maboudian,
"High-selectivity Etching of Polycrystalline 3C-SiC Films using HBr-based
Transformer Coupled Plasma", Applied Physics Letters, 82 (11), 1742-4 (2003). &
Selected paper, Virtual Journal of Nanoscale Science & Technology, Volume 7
(12), 2003.
D. Gao, M.B.J. Wijesundara, C. Carraro, C.W. Low, R.T. Howe, and R. Maboudian,
“High Modulus Polycrystalline 3C-SiC Technology For RF MEMS”, Proc.
Transducers’03, The 12th International Conf. Solid-State Sensors & Actuators,
1160-1163.
W. R. Ashurst, C. Carraro, and W. Frey, R. Maboudian, "Wafer Level Anti-Stiction Coatings with Superior Thermal Stability", Technical Digest, Proceedings of the 2002 Solid-State Sensor and Actuator Workshop, Hilton Head '02, June 2002, pp. 142-145.
C. Carraro and L. Magagnin, R. Maboudian, "Selective Metallization of Si Micromechanical Devices", Electrochimica Acta 47, 2583-2588 (2002).
L. Magagnin V. Bertani, P.L. Cavallotti, R.
Maboudian and C. Carraro "Selective deposition of gold nanoclusters on
silicon by a galvanic displacement process", Microelectronic Engineering,
64, 479-485 (2002).
M. B. J. Wijesundara, C. R. Stoldt, C. Carraro, R. T. Howe and R. Maboudian,
"Nitrogen Doping of 3C-SiC Films Grown by Single-Source Chemical Vapor
Deposition", Journal of Thin Solid Films 419, 69-75 (2002).
C.R. Stoldt, C.
Carraro, W.R. Ashurst, D. Gao, R. T. Howe and R. Maboudian, "A Low-Temperature CVD
Process for Silicon Carbide MEMS," Sensors and Actuators A 97,
410-415 (2002).
L. Magagnin, R. Maboudian and C. Carraro, "Gold Deposition by Galvanic Displacement on Semiconductor Surfaces: Effect of Substrate on Adhesion", Journal of Physical Chemistry B 106, 401-407 (2002).
R. Maboudian, W. R. Ashurst and C. Carraro, "Tribological Challenges in MEMS", Tribology Letters 12, 95-100 (2002).
W. R. Ashurst, C. Yau, C. Carraro, R. Maboudian and M. T. Dugger, "Dimethyldichlorosilane as Anti-Stiction Coating for MEMS: a Quantitative Comparison to Octadecyltrichlorosilane", Journal of Microelectromechanical Systems 10, 41-49 (2001).
W. R. Ashurst, C. Yau, C. Carraro and R. T. Howe, and R. Maboudian, "Alkene Based Monolayer Films as Anti-Stiction Coatings for Polysilicon MEMS", Sensors and Actuators A 91, 239-248 (2001).
M. C. Salvadori, M. C. Fritz, C. Carraro, R. Maboudian, O. R. Monteiro and I. G. Brown, "Characterization of AFM Cantilevers Coated with Diamond-like Carbon", Diamond and Related Materials 10, 2190-2194 (2001).
M. C. Fritz, C. Carraro, and R. Maboudian, "Functionalization of Scanning Force Microscopy Cantilevers via Galvanic Displacement Technique", Tribology Letters 11, 171-175 (2001).
C.R. Stoldt, M.C. Fritz, C. Carraro, and R. Maboudian, "Micromechanical Properties of Silicon Carbide Thin Films Deposited Using Singe-Source CVD," Applied Physics Letters 79, 347 (2001) .
C.R. Stoldt, C. Carraro, W.R. Ashurst, M.C. Fritz, D. Gao, and R. Maboudian, "Novel Low-Temperature CVD Process for Silicon Carbide MEMS," Proceedings Transducers '01, Proceedings of 11th International Conference on Solid State Sensors and Actuators / Eurosensors XV, Munich, Germany, June 10-14, pp.984-987.
C. R. Stoldt, R. Maboudian, and C. Carraro, "Vibrational Spectra of Hydrogenated Buckminsterfullerene: A Candidate for the Unidentified Infrared Emission", The Astrophysical Journal Letters, Feb. 20, 2001.
L. Magagnin, R. Maboudian, and C. Carraro, "Selective Deposition of Thin Copper Films onto Silicon with Improved Adhesion", Electrochemical and Solid-State Letters, 4, 2001.
Sang M. Han, W. Robert Ashurst, Carlo Carraro, and Roya Maboudian, "Formation of Alkanethiol Monolayer on Ge(111)", Journal of the American Chemical Society, 2001.
C.R. Stoldt, C. Carraro, R. Maboudian, "Deuterium etching of the Si-rich SiC(0001) (3×3) surface reconstruction", Surface Science, 466, pp. 66-72 (2000)
C. Cabuz, E. I. Cabuz, T. R. Ohnstein, J. Neus, and R. Maboudian, "Factors Enhancing the Reliability of Touch-Mode Electrostatic Actuators", Sensors and Actuators A 79, 245-25 (2000).
M. M. Sung, C. Carraro, O. W. Yauw, and Y. Kim,g, C. Carraro, O. W. Yauw, and Y. Kim, and R. Maboudian, "Reversible Liquid-Liquid Transitions in the Early Stages of Monolayer Self-Assembly", Journal of Physical Chemistry", Journal of Physical Chemistry B 104, 1556-1559 (2000).
R. Maboudian, "Self-Assembled Monolayers as Anti-Stiction Coating for MEMS", invited review article, 10th International Conference on Solid-State Sensors and Actuators, Transducers'99, pp.22-25, 1999.
M. M. Sung, G. J. Kluth, and R. Maboudian, "Alkylsiloxane Self-Assembled Monolayers on Si3N4", Journal of Vacuum Science and Technology A 17, 540-544 (1999).
R. Maboudian, "Surface Processes in MEMS Technology" , Surface Science Reports, 30, 207-270 (1998).
U. Srinivasan, M. R. Houston, R. T. Howe, and R. Maboudian, "Alkylsiloxane-based Self-Assembled Monolayers for Stiction Reduction in Silicon Micromachines", Journal of Micro-Electro-Mechanical Systems, 7, 252-260 (1998).
R. Maboudian, "Adhesion and Friction Issues Associated with Reliable Operation of MEMS", Materials Research Society Bulletin, 23, 47-51 (1998).
U. Srinivasan, R. T. Howe, and R. Maboudian, "Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements" , Proceedings of Tribology Issues and Opportunities in MEMS Workshop, Kluwer Academic Publishers, Dordrecht, pp. 597-606 (1998).
U. Srinivasan, J. D. Foster, U. Habib, R. T. Howe, R. Maboudian, D. C. Senft, and M. T. Dugger, "Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers" , Technical Digest, Proceedings of the 1998 Solid-State Sensor and Actuator Workshop, Hilton Head '98 , pp. 156-161 (1998).
C. Cabuz, E. I. Cabuz, T. R. Ohnstein, J. Neus, and R. Maboudian, "High Reliability Touch-Mode Electrostatic Actuators (TMEA)" , Technical Digest, Proceedings of the 1998 Solid-State Sensor and Actuator Workshop, Hilton Head '98 , pp. 296-299 (1998).
C. Carraro, O. W. Yauw, M. M. Sung, and R. Maboudian, "Observation of Three Growth Mechanisms in Self-Assembled Monolayers" , Journal of Physical Chemistry, 102, pp. 4441-4445 (1998).
R. Maboudian, "Anti-Stiction Coatings for Surface Micromachines" , SPIE, 3511, 108-113 (1998).
U. Srinivasan, M. R. Houston and R. T. Howe, R. Maboudian, "Self-Assembled Fluorocarbon Films for Enhanced Stiction Reduction", Technical Digest, Proceedings of the 9th International Conference on Solid-State Sensors and Actuators, Transducers '97, pp. 210-213 (1997).
M.R. Houston, R. Maboudian, and R.T. Howe, "Effect of Hydrogen Termination on the Work of Adhesion between Rough Polycrystalline Silicon Surfaces", Journal of Applied Physics 81, 3474-3483 (1997).
R. Maboudian, and R.T. Howe, "Stiction Reduction Processes for Surface Micromachines",Tribology Letters 3, 215-222 (1997).
M.M. Sung, G.J. Kluth, O.W. Yauw, and R. Maboudian, "Thermal Behavior of Alkyl Monolayers on the Si (100) Surface" , Langmuir, 13, 6164-6168 (1997).
M.R. Houston, R. Maboudian, and R.T. Howe, "Self-Assembled Monolayer Films as Durable Anti-Stiction Coatings for Polysilicon Microstructures", Proceedings of the 1996 Solid-State Sensor and Actuator Workshop, Hilton Head '96, pp. 42-47 (1996).
G. J. Kluth, and R. Maboudian, "Oxidation Mechanism of Ammonium Fluoride-Treated Si(100) Surfaces", Journal of Applied Physics 80, 5408-5414 (1996).
M.R. Houston, R. Maboudian, and R.T. Howe , "Ammonium Fluoride Anti-Stiction Treatments for Poly-Silicon Microstructures", Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, pp. 210-213 (1995).
M.R. Houston and R. Maboudian, "Stability of NH4F-Treated Si(100)" , Journal of Applied Physics 78, 3801-3808 (1995).
M.R. Houston, R.T. Howe, K. Komvopoulos and R. Maboudian, "Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices", Materials Research Society Symposium Proceedings, 383, 391-402, (1995).
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